Sensitivity analysis of the surface integrity of monocrystalline silicon to grinding speed with same grain depth-of-cut

• 作者: Dong-Ming Guo Ning Huang Ping Zhou Ren-Ke Kang Ying Yan Zi-Guang Wang
• 来源期刊: 先进制造进展（英文版）
• 关键词: Rotational grinding Silicon wafer Surface integrity Cutting speed Residual stress
• 年，卷（期）: 2020,（1）
• 页码范围: 97-106
• 页数: 10页
• 语种: 英文

摘要

Mechanisms for removal of materials during the grinding process of monocrystalline silicon have been extensively studied in the past several decades.However,debates over whether the cutting speed significantly affects the surface integrity are ongoing.To address this debate,this study comprehensively investigates the effects of cutting speed on surface roughness,subsurface damage,residual stress,and grinding force for a constant grain depth-of-cut.The results illustrate that the changes in the surface roughness and subsurface damage relative to the grinding speed are less obvious when the material is removed in ductile-mode as opposed to in the brittle-ductile mixed mode.A notable finding is that there is no positive correlation between grinding force and surface integrity.The results of this study could be useful for further investigations on fundamental and technical analysis of the precision grinding of brittle materials.