420-GHz terahertz SIW slot antenna with quartz superstrates in silicon technology
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摘要:
To meet the needs of terahertz imaging and communication,a 420-GHz on-chip antenna (OCA) with high gain and high radiation efficiency is designed using a standard 55 nm CMOS technology.In the proposed OCA structure,the substrate integrated waveguide (SIW) antenna forms a back cavity to suppress the surface waves and separate the radiation aperture from the low-resistivity substrate.To increase the efficiency of OCA,a single-layer quartz superstrate is proposed.An analytical model to calculate the radiation efficiency is presented,and a detailed design approach is described.The proposed antenna is simulated using Ansoft HFSS.The simulated antenna has a maximum gain of 4.9 dBi and a radiation efficiency of 76.27%.The bandwidth of S11 below-10 dB is 44 GHz.The OCA has good performance and can be widely used in terahertz imaging and communication.