Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings

• 作者: Behnam Kheyraddini Mousavi Mani Hossein Zadeh Steven Roy Julien Brueck Tito Busani
• 来源期刊: 应用数学与应用物理(英文)
• 学科: 工学
• 关键词: MAXIMUM TRANSMISSION Mechanical Stability REFLECTION LASER NANO-STRUCTURE
• 年，卷（期）: 2020,（2）
• 页码范围: 247-258
• 页数: 12页
• 分类号: TG1

摘要

Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.