Foreword to the Special Issue on Micro- and Nano-Metrology in Japan(I)

• 作者: Yuki Shimizu Yasuhiro Mizutani Masaki Michihata
• 来源期刊: 纳米制造与计量(英文)
• 学科: 工学
• 关键词: METROLOGY BECOMING JAPAN
• 年，卷（期）: 2021,（1）
• 页码范围: 1-2
• 页数: 2页
• 分类号: TB3

摘要

Micro-and nano-metrology occupies an important position in modern production engineering where higher-precision machining is required.A visualization of the process is indispensable for the creation of new technologies in stateof-the-art manufacturing that deals with the geometrical quantity in micrometers/nanometers.Precision micro-and nano-metrology is thus becoming more and more important as the platform of various manufacturing technologies,as well as strategic tools for responding to rapidly changing fabrication techniques in many scientific and industrial fields.