CeO2 is one of the main catalysts for solid oxide fuel cell(SOFC).It is critical to find a green and cost-effective fabrication method for CeO2 at scale.In this study,the CeO2 microspheres were prepared by one-step ultrasonic spray pyrolysis of cerium chloride solution at 700℃.Scanning electron microscopy(SEM)and trans-mission electron microscopy(TEM)study demonstrate that the prepared CeO2 microspheres exhibit a particle size of 0.01-1.08 μm with a mean particle size of 0.23 μm,and more than 94%of the particles have a diameter less than 0.5 μm.But the presence of residual Cl in the fabricated CeO2 microspheres blocks the active sites and leads to the significant degradation of SOFC performance.The forma-tion mechanism and distribution of residual Cl in the fab-ricated CeO2 microspheres were systemically studied.The water washing method was shown to effectively reduce the residual Cl in the CeO2 microspheres.Overall,this work provides a clean manufacturing process for the preparation of SOFC electrode/electrolyte materials.