A lattice measuring method based on integral imaging technology

• 作者: ZHANG Xiao-dong LI Suo-yin HAN Zhi-guo ZHAO Lin LIANG Fa-guo WU Ai-hua
• 来源期刊: 光电子快报（英文版）
• 年，卷（期）: 2021,（5）
• 所属期刊栏目: Measurement Devices and Methods
• 页码范围: 313-316
• 页数: 4页
• 语种: 英文
• DOI: 10.1007/s11801-021-0090-x

摘要

Aiming at the problem that the lattice feature exceeds the view field of the scanning electron microscope (SEM)measuring system,a new lattice measuring method is proposed based on integral imaging technology.When the sys-tem works,the SEM measuring system is equivalent to an integral image acquisition system.Firstly,a lattice measur-ing method is researched based on integral imaging theory.Secondly,the system parameters are calibrated by the VLSI lattice standard.Finally,the value of the lattice standard to be tested is determined based on the calibration pa-rameters and the lattice measuring algorithm.The experimental results show that,compared with the traditional elec-tron microscope measurement method,the relative error of the measured value of the algorithm is maintained within 0.2％,with the same level of measurement accuracy,but it expands the field of view of the electron microscope meas-urement system,which is suitable for the measurement of samples under high magnification.