Phase structure of sputtered Ta coating and its ablation behavior by laser pulse heating (LPH)

• 作者: Yunsong Niu Lingling Xing Feng Yang Huawei Li Minghui Chen Shenglong Zhu Fuhui Wang
• 来源期刊: 材料科学技术（英文版）
• 年，卷（期）: 2021,（6）
• 页码范围: 7-17
• 页数: 11页
• 语种: 英文

摘要

Phase structure of sputtered Ta coating in the negative glow space and LPH effect were explored.The whole coating/substrate system is substrate → physically gas-absorbed Fe surface → oxygen-enriched TaOx layer → amorphous Ta → α and β dual phase → single α phase.After LPH course,microstructure of Ta coating shows intact,only a few cracks emerge after 100 laser pulses,exhibiting thin HAZ but thick Fe/Ta ICZ,without martensitic transformation.For the electrodeposited Cr coating,continuous thermal stresses produce many extra micro-crack,substrate oxidation and martensitic transformation,leading to crack propagations and final bulk delamination,without any ICZ.