Towards Fabrication of Atomic Dopant Wires via Monolayer Doping Patterned by Resist-Free Lithography

• 作者: Chufan Zhang Ke Li Xiaoxian Zang Fuyuan Ma Yaping Dan
• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2021,（2）
• 所属期刊栏目: CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY
• 页码范围: 106-111
• 页数: 6页
• 语种: 英文
• DOI: 10.1088/0256-307X/38/2/028101

摘要

Fabrication of atomic dopant wires at large scale is challenging. We explored the feasibility to fabricate atomic dopant wires by nano-patterning self-assembled dopant carrying molecular monolayers via a resist-free litho-graphic approach.