Leakage current characteristics of SrTiO3/LaNiO3/Ba0.67Sr0.33TiO3/SrTiO3 heterostructure thin films

• 作者: Yi Zhang Xiao-Yang Chen Bin Xie Zhi Wang Ming-Jian Ding Qiao He Hang Ji Tao-Lan Mo Ping Yu
• 来源期刊: 稀有金属（英文版）
• 年，卷（期）: 2021,（4）
• 所属期刊栏目: ORIGINAL ARTICLES
• 页码范围: 961-967
• 页数: 7页
• 语种: 英文

摘要

There is an urgent demand to explore new approaches of improving the electric breakdown strength of the ferroelectric thin-film capacitor without the degradation of the high dielectric constant.In this work,LaNiO3/Ba0.67Sr0.33TiO3 (LNO/BST) thin film and SrTiO3(STO)/LNO/BST/SrTiO3 (STO) were prepared by using radio frequency (RF) magnetron sputtering technique and ultrathin STO insulator layers were inserted between the LNO/BST and metal electrodes (Au or Pt) to improve the electric breakdown strength and the leakage current of the LNO/BST thin film.X-ray diffraction (XRD) and scanning electron microscopy (SEM) investigations revealed that these multilayer thin films show compact,smooth and uniform morphologies.The leakage current density of STO/LNO/BST/STO thin film was decreased by one order of magnitude and breakdown strength of STO/LNO/BST/STO thin film was enhanced from 0.72 to 1.26 MV·cm-1 compared with that of LNO/BST thin film.Moreover,the dielectric constant of the STO/LNO/BST/STO thin film keeps at the same level as that of LNO/BST thin film,and dielectric loss of the STO/LNO/BST/STO thin film was decreased slightly compared with that of LNO/BST thin film.