A Predictive Instrument for Sensitive and Expedited Measurement of Ultra-Barrier Permeation

• 作者: Jianfeng Wanyan Kun Cao Zhiping Chen Yun Li Chenxi Liu Runqing Wu Xiao-Dong Zhang Rong Chen
• 来源期刊: 工程（英文）
• 年，卷（期）: 2021,（10）
• 所属期刊栏目: Advanced Measuring Instrument-Article
• 页码范围: 1459-1468
• 页数: 10页
• 语种: 英文

摘要

The reliable operation of flexible display devices poses a significant engineering challenge regarding the metrology of high barriers against water vapor.No reliable results have been reported in the range of 10-6g·(m2·d)-1,and there is no standard ultra-barrier for calibration.To detect trace amount of water vapor permeation through an ultra-barrier with extremely high sensitivity and a greatly reduced test per-iod,a predictive instrument was developed by integrating permeation models into high-sensitivity mass spectrometry measurement based on dynamic accumulation,detection,and evacuation of the permeant.Detection reliability was ensured by means of calibration using a standard polymer sample.After calibra-tion,the lower detection limit for water vapor permeation is in the range of 10-7g·(m2·d)-1,which sat-isfies the ultra-barrier requirement.Predictive permeation models were developed and evaluated using experimental data so that the steady-state permeation rate can be forecasted from non-steady-state results,thus enabling effective measurement of ultra-barrier permeation within a significantly shorter test period.