Effect of Mo doping on phase change performance of Sb2Te3

• 作者: Wan-Liang Liu Ying Chen Tao Li Zhi-Tang Song Liang-Cai Wu
• 来源期刊: 中国物理B（英文版）
• 年，卷（期）: 2021,（8）
• 所属期刊栏目: CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES
• 页码范围: 500-504
• 页数: 5页
• 语种: 英文
• DOI: 10.1088/1674-1056/abe22d

摘要

Mo,as a dopant,is doped into SbTe to improve its thermal stability.It is shown in this paper that the Mo-doped Sb2Te3(Mo0.26Sb2Te3,MST) material possesses phase change memory (PCM) applications.MST has better thermal stability than Sb2Te3(ST) and will crystallize only when the annealing temperature is higher than 250 ℃.With the good thermal stability,MST-based PCM cells have a fast crystallization time of 6 ns.Furthermore,endurance up to 4 × 105 cycles with a resistance ratio of more than one order of magnitude makes MST a promising candidate for PCM applications.