Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers

• 作者: Qing Yu Yi-Fei Zhang Chang-Hao Zhao Kai-Yong He Ru-Tian Huang Yong-Cheng He Xin-Yu Wu Jian-She Liu Wei Chen
• 来源期刊: 中国物理B（英文版）
• 年，卷（期）: 2021,（7）
• 所属期刊栏目: CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC,AND OPTICAL PROPERTIES
• 页码范围: 573-577
• 页数: 5页
• 语种: 英文
• DOI: 10.1088/1674-1056/abe0c6

摘要

Superconducting transition edge sensor (TES) bolometers require superconducting films to have controllable transi-tion temperatures Tc in different practical applications.The value of Tc strongly affects thermal conductivity and thermal noise performance of TES detectors.A1 films doped with Mn (A1-Mn) of different concentrations can accomplish tunable Tc.A magnetron sputtering machine is used to deposit the A1-Mn films in this study.Fabrication parameters including sputtering pressure and annealing process are studied and their influences on Tc and superconducting transition width ATc are optimized.The A1-Mn films with ATc below 1.0 mK for Tc in a range of 520 mK-580 mK are successfully fabricated.