In this work,the high temperature friction mechanism of the tetrahedral amorphous carbon(ta-C)film was elucidated.The multilayer ta-C film with alternating hard and soft sub-layers exhibited a low fric-tion coefficient of 0.14 at 400℃before a sudden failure occurred at 4600 cycles.The wear failure was at-tributed to the gradual consumption of the ta-C film at the contact region.The design of a hard or soft top layer effectively regulated the high temperature friction properties of the multilayer ta-C.The addition of a hard top layer contributed to a low friction coefficient(0.11)and a minor wear rate(4.0×10-7 mm3/(N m)),while a soft top layer deteriorated the lubrication effect.It was proposed that the passivation of dan-gling bonds at the sliding interface dominated the low-friction mechanism of the ta-C film at high tem-perature,while the friction induced graphitization and the formation of sp2-rich carbonaceous transfer layer triggered C-C inter-film bonding,resulting in serious adhesion force and lubrication failure.More-over,the multilayer ta-C film with hard top layer obtained excellent friction performance within 500℃,while the high temperature induced oxidation and volatilization of carbon atoms led to the wear failure at 600℃.