Lithium niobate microring with ultra-high Q factor above 108

• 作者: Renhong Gao Ni Yao Jianglin Guan Li Deng Jintian Lin Min Wang Lingling Qiao Wei Fang Ya Cheng
• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2022,（1）
• 所属期刊栏目: Nonlinear Optics
• 页码范围: 117-121
• 页数: 5页
• 语种: 英文
• DOI: 10.3788/COL202220.011902

摘要

We demonstrate integrated lithium niobate[LN]microring resonators with Q factors close to the intrinsic material absorp-tion limit of LN.The microrings are fabricated on pristine LN thin-film wafers thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching.A record-high Q factor up to 108 at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion-induced lattice damage,indicating an ultra-low waveguide propagation loss of ～0.0034 dB/cm.The ultra-high Q microrings will pave the way for integrated quan-tum light source,frequency comb generation,and nonlinear optical processes.