Microspheres give improved resolution in nondestructive examination of semiconductor devices

• 作者: R.C.Woods
• 来源期刊: 光：科学与应用（英文版）
• 年，卷（期）: 2022,（3）
• 所属期刊栏目: News & Views
• 页码范围: 302-303
• 页数: 2页
• 语种: 英文

摘要

The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light:Science and Applications article that using an additional glass microsphere in the optical path can improve the resolution significantly.