A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors

• 作者: Li-An Li Fang-Yuan Zhao Shen-Qiang Zhai Feng-Qi Liu Zhong-Ming Wei
• 来源期刊: 稀有金属（英文版）
• 年，卷（期）: 2022,（1）
• 所属期刊栏目: SPECIAL TOPIC:2D MATERIALS
• 页码范围: 319-324
• 页数: 6页
• 语种: 英文

摘要

The normal fabrication process for electronic and opto-electronic devices can bring in significant modifications on two-dimensional (2D) semiconductors' intrinsic properties.To address this issue,some dry methods have been developed,such as "transfer contact" method and "shadow mask technology".However,the method that can combine the advantages of low cost,non-destruction,and high reliability at sub-micrometer scale is rarely reported.Here,we demonstrate a fabrication technique using ultrafine quartz fibers as shadow masks.