Since Liu and Cohen predicted that the bulk modulus of carbon nitride films with the structure of β-C3N4 are comparable or even surpass those of diamond, intensive experimental efforts have been done to synthesize this new material. Various kinds of synthesized methods have been applied to fabricate carbon nitride films, whereas samples with sufficient amounts of crystallized C3N4 structure or with mechanical properties comparable to the predicted values have not been reported. From the basic of ion-solid interaction, Wang, et al. have proposed a novel method, "low energy ion implantation + swift heavy ion irradiation", for synthesizing compound in atom mixed materials. This method has been used in the present work.