表面清洗

• 来源期刊: 表面工程：英文版
• 学科: 工学
• 关键词: 表面清洗 激光微处理 数据存储 微电子电路
• 年，卷（期）: bmgcywb_2005,（1）
• 页码范围: 4-5
• 页数: 2页
• 分类号: TN249

摘要

[ 篇名 ] ADVANCED LASER APPLICATIONS IN MICROELECTRONICS AND DATA STORAGE DEVICES（INVITED)，[ 篇名] ANNEALING TEMPERATURE DEPENDENCE OF CONTACT RESISTANCE AND STABL1TY FOR Ti/AI/Pt/Au OHMIC CONTACTS TO BULK n=ZaO，[篇名] Applications of thermography in the assessment of masonry, airport pavements and composite materials，[篇名 ] Bulk Plasma Production Using Gaseous Discharge System with External Electron Injection，[篇名] Characterization Of Nano-Meter Scale Roughness Of CVD Silicon And Silicon Dioxide Films For 3-D Device Integration，[ 篇名 ] CLEANING OF THE SURFACE OF SILICON STRUCTURES IN THE TECHNOLOGY OF VERY LARGE-SCALE INTEGRATED CIRCUITS WITH THE USE OF RAPID HEAT TREATMENT，[篇名] Effects of active elements on oxide removal by a vacuum arc。