空气轴承

• 来源期刊: 机械工程通用零部件：英文版
• 学科: 工学
• 关键词: 空气轴承 ABS设计 飞行高度修正 移动精度
• 年，卷（期）: 2005,（2）
• 页码范围: 37-40
• 页数: 4页
• 分类号: TH133.35

摘要

ABS DESIGN AND FLY HEIGHT MODULATION OF FEMTO SLIDERS；Achievement of nanometric accuracy with stepper-driven machine；AFM/Optical metrology and application for head and disk；AIR-BEARING DESIGN BASED ON GLOBAL APPROXIMATION CONCEPTS；Air-bearing linear actuator for highly precise tracking；An active head slider using a piezoelectric cantilever for in situ flying-height control……