Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography

• 作者: Hiroaki Misawa Hiroyo Segawa
• 来源期刊: 自然科学期刊(英文)
• 学科: 工学
• 关键词: LITHOGRAPHY CAPILLARY Force Assembly
• 年，卷（期）: 2009,（3）
• 页码范围: 176-180
• 页数: 5页
• 分类号: TN2

摘要

Two-dimensional (2D) periodic TiO2 pillar arrays, applicable to photonic crystals and micro-channels, were fabricated by direct patterning of a TiO2-organic hybrid material by multi-beam laser interference lithography and calcination of hybrid patterns. 2D periodic pillars of a TiO2– organic hybrid material were prepared by irra-diation with the interference pattern of femto-second laser beams and removal of the non- irradiated portions. Two types of periodic pillar arrays, standing pillars and top-gathering pillars (four pillars gathered at the top), were obtained, depending on laser irradiation conditions. After calcination of TiO2–organic hybrid pillars, TiO2 pillar arrays were obtained without collapse.