Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages

• 作者: Biing-Der Liaw Bor-Yih Chang Lih-Chang Lin
• 来源期刊: 智能控制与自动化(英文)
• 学科: 工学
• 关键词: Micro/Nano Stage Adaptive FUZZY Control HYSTERESIS OBSERVER FUZZY Function Approximator
• 年，卷（期）: 2012,（4）
• 页码范围: 390-403
• 页数: 14页
• 分类号: TP2

摘要

This paper considers the analytical dynamics with simplified Dahl hysteresis model for a three-axis piezoactuated micro/nano flexure stage. An adaptive controller with nonlinear dynamic hysteresis observer is proposed using Lyapunov stability theory. In the controller, a fuzzy function approximator with parameters update law is included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effects. Simulation results are used to demonstrate the control performance.