Investigation of a Pressure Sensor with Temperature Compensation Using Two Concentric Wheatstone-Bridge Circuits

• 作者: Chi-Chang Hsieh Chih-Ching Hung Yan-Huei Li
• 来源期刊: 现代机械工程(英文)
• 学科: 医学
• 关键词: Pressure SENSOR Temperature COMPENSATION Wheatstone-Bridge CIRCUIT MEMS
• 年，卷（期）: 2013,（2）
• 页码范围: 104-113
• 页数: 10页
• 分类号: R73

摘要

This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.