Comparison on Morphological and Optical Properties of TiO<SUB>2</SUB>Thin Films Grown by Single-Pulse and Multi-Pulse Laser Ablation

• 作者: Luis Ponce-Cabrera Yonic Pe?aloza-Mendoza
• 来源期刊: 表面工程材料与先进技术期刊(英文)
• 学科: 医学
• 关键词: Pulsed Laser Deposition Single-Pulse Ablation MULTI-PULSE Ablation TiO2 Thin Film
• 年，卷（期）: bmgcclyxjjsqkyw_2015,（1）
• 页码范围: 17-23
• 页数: 7页
• 分类号: R73

摘要

TiO2 thin films were prepared on glass substrates using the PLD (Pulsed Laser Deposition) technique. In order to carry out the ablation process, a Nd:YAG laser was used emitting in 1064 nm wavelength at 10 Hz repetition rate, set up for operating in both single-pulse and multi-pulse regimes. A comparison of the deposition rate, the optical and morphological properties of the layers obtained from both ablation regimes was made, which showed that the multi-pulsed ablation produced layers with a higher surface quality and better optical properties.