Field emission occurred in superconducting radio-frequency(SRF)cavities is the major obstacle of the accelerators operating at high gradient,which partly caused by the inner surface contamination,such as the hydrocarbons and the absorbed residual gas.The plasma processing can be an effective method to solve the field emission issues.The properties of low temperature glow discharge,which was argon plasma with the chemically reactive oxygen,were investigated for the SRF cavities used for CADS project.