A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes

• 作者: Chao Zhao Lisong Dong Rui Chen Yansong Liu Yayi Wei
• 来源期刊: 微电子制造学报
• 学科: 工学
• 关键词: micro-sieves HIGH volume manufacturing defect free HIGH yield
• 年，卷（期）: 2018,（1）
• 页码范围: 11-20
• 页数: 10页
• 分类号: TN

摘要

Micro-sieves have been widely used in medical treatment,quarantine,environment,agriculture,pharmacy and food processing.However,the manufacturing and yield improvement have been difficult due to multiple challenges,such as the sieve unit release defect,cracking,and KOH corrosion.In this paper,we report process details and discuss technical difficulties which are usually the root-causes for process failures,and demonstrate a reliable and high yield production of SiNx micro-sieves processed with our novel method,which is also compatible with high volume manufacturing.