Investigations of the microstructure formation and elemental formation at the solid-liquid interfaces are of great significance due to the various valuable applications such as super-capacitors,battery,medical implantation and electrochemical industry and research.Traditional ion beam analysis is performed in vacuum which just allows investigation of solid samples.Liquids interface with a solid surface are not accessible for the vacuum measurements in the ion beam laboratory.By utilizing a silicon nitride vacuum window coated with 10 nm aluminum we built up an enclosed chamber,which can hold solution in vacuum and is able to perform precise elemental analysis by means of ion beam analysis at the solid-liquid interface.By utilizing a silicon nitride vacuum window coated with several nm aluminum we built up an enclosed chamber,which can hold solution in vacuum and is able to perform precise elemental analysis by means of ion beam analysis at the solid-liquid interface the chamber of the solid-liquid interface probe used the aluminum layer as electrode,which allowed online apply and adjust the electric field at the interface.