Current Status of the Integrated Circuit Industry in China--IC Special Equipment Industry by:Lithotechsolutions.org

• 来源期刊: 微电子制造学报
• 学科: 工学
• 关键词: Current STATUS of the Integrated CIRCUIT INDUSTRY in China--IC Special Equipment INDUSTRY Lithotechsolutions.org China's SEMICONDUCTOR
• 年，卷（期）: 2019,（1）
• 页码范围: 32-37
• 页数: 6页
• 分类号: TN

摘要

1.Introduction In recent years,China's semiconductor equipment industry has made considerable progress,some key equipment have been developed,achieving a revolutionary breakthrough.Meanwhile,a great number of domestic equipment have been applied to large mass production lines,indicating new progress in industrialization.From the policy perspective,the state has continuously introduced policies to support the localization of the semiconductor industry,and has invested more than 100 billion yuan to boost the development of the semiconductor industry chain since 2014.