Structure,Adhesion Strength and Corrosion Resistance of Vacuum Arc Multi-Period NbN/Cu Coatings

• 作者: G.I.Zelenskaya H.O.Postelnyk O.Chocholaty O.V.Sobol’
• 来源期刊: 金属材料研究(英文)
• 学科: 工学
• 关键词: Vacuum Arc method NbN/Cu Phase composition ADHESION strength IMPEDANCE spectroscopy POLARIZATION resistance
• 年，卷（期）: 2020,（1）
• 页码范围: 1-6
• 页数: 6页
• 分类号: TG1

摘要

resistance,and adhesive strength of vacuum-arc multi-period NbN/Cu coatings is studied.It was found that in thin layers(about 8 nm,in a constant rotation mode),regardless of the change in the pressure of the nitrogen atmosphere,a metastableδ-NbN phase forms(cubic crystal lattice of the NaCl type).At a layer thickness of~40 nm or more,a phase composition changes from the metastableδ-NbN to the equilibriumε-NbN phase with a hexagonal crystal lattice.In the presence of theε-NbN phase in the niobium nitride layers,the highest adhesive strength is achieved with a value of LС5=96.5 N.Corrosion resistance tests have shown that for all the studied samples the corrosion process has mainly an anodic reaction.The highest corrosion resistance was shown by coatings obtained at a pressure of 7·10-4 Torr,with the smallest bias potential of-50 V and the smallest layer thickness;with a thickness of such a coating of about 10 microns,its service life in the environment of the formation of chloride ions is about a year.