Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

• 作者: Yuki Shimizu
• 来源期刊: 纳米制造与计量(英文)
• 学科: 工学
• 关键词: Planar scale grating Interference lithography Lloyd’s mirror interferometer Interference fringe
• 年，卷（期）: 2021,（1）
• 页码范围: 3-27
• 页数: 25页
• 分类号: TN2

摘要

Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed.