High Yield Transfer of Clean Large?Area Epitaxial Oxide Thin Films

• 作者: Bowen Zhang Chao Yun Judith L.Mac Manus-Driscoll
• 来源期刊: 纳微快报（英文）
• 年，卷（期）: 2021,（2）
• 页码范围: 363-376
• 页数: 14页
• 语种: 英文

摘要

In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitax-ial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr3Al2O6 sacri-ficial layer. The crystallinity, surface morphology, continuity, and purity of the films are all preserved in the transfer process. We demonstrate the applicability of our method for three dif-ferent film compositions and structures of thickness ～ 100 nm. Furthermore, we show that by using epitaxial nanocomposite films, lift-off yield is improved by ～ 50％ compared to plain epitaxial films and we ascribe this effect to the higher frac-ture toughness of the composites. This work shows important steps towards large-scale perovskite thin-film-based electronic device applications.