Micro displacement reconstruction of self-mixing grating interferometer based on Littrow structure

• 作者: Xiufang Wang Lina Feng Peng Chen Zhen Huang Ye Yuan
• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2021,（10）
• 所属期刊栏目: Lasers, Optical Amplifiers, and Laser Optics
• 页码范围: 49-54
• 页数: 6页
• 语种: 英文
• DOI: 10.3788/COL202119.101402

摘要

An improved self-mixing grating interferometer based on the Littrow structure has been proposed in this Letter to measure displacement.The grating is integrated inside the interferometer to reduce the impact on the vibration parameters of the object caused by the grating attached to the vibrating object.The +1st diffracted light returns to the laser cavity after being reflected by the target object,and self-mixing interference occurs.The displacement can be reconstructed by processing the self-mixing signals.The feasibility of the proposed interferometer is demonstrated by experimental measurements,and results show that it can achieve micro displacement measurement with the maximum absolute errors of less than 50 nm.