Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

• 作者: Sheng Sun Jianyuan Wang Yuan Ning Menglun Zhang
• 来源期刊: 纳米技术与精密工程（英文版）
• 年，卷（期）: 2022,（1）
• 所属期刊栏目: RESEARCH ARTICLES
• 页码范围: 35-42
• 页数: 8页
• 语种: 英文

摘要

This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer(PMUT)for detection and imaging of surface stains.A 508 kHz PMUT array is designed,fabricated,and characterized in terms of its electrical and acoustic properties,and it is used in a pulse echo validation test.Imaging of stains on metal blocks is successfully demonstrated.Compared with existing optical methods for stain detection,the proposed approach can work in a dark environment without color requirements.This work provides a new and promising route for the development of miniaturized stain detection systems.