MAGNETIC FIELD GRADIENT EFFECTS ON ION FLUX BEHAVIORS IN ECR PLASMA SOURCES

• 来源期刊: 物理学报（海外版）（英文版）
• 学科: 物理学
• 关键词: electron cyclotron resonance magnetic field gradient configuration space simulation results plasma sources
• 年，卷（期）: 1998,（9）
• 页码范围: 688-694
• 页数: 7页
• 分类号: O4
• 语种: 英文

摘要

The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr Vθ). The simulation is focused on the magnetic field gradient effects on ion flux behaviors in electron cyclotron resonance plasma sources. The simulation results show that, when the magnetic field gradients increase, electron temperature, plasma density, ionization rate, and ion flux in Zdirection would decrease, while ion energy and plasma potential would increase.