ON THE CHARACTERIZATION OF METALLIC SUPERLATTICE STRUCTURES BY X—RAY DIFFRACTION

• 作者: MINGXU WenxueYU
• 来源期刊: 同步辐射装置用户科技论文集
• 学科: 物理学
• 关键词: 金属超结晶格子 X射线衍射 结构特征
• 年，卷（期）: 1999,（1）
• 页码范围: 142-148
• 页数: 7页
• 分类号: O741.1

摘要

To solve the problem on the microstructural characterization of metallic superlattices,taking the NiFe/Cu superlattices as example,we show that the sturctures of metallic superlattices can be characterized exactly by combining low-angle X-ray diffraction with high-angle X-ray diffraction.First,we determine exactly the total film thickness by a straightforward and precise method based on a modified Bragg law from the subsidiary maxima around the low-angle X-ray diffraction peak.Then.by combining with the simulation of high-angle X-ray diffraction.we obtain the sturctural parameters such as the superlattice period,the sublayer and buffer thickness,This characterization procedure is also applicable to other types of metallic superlattices.