Amorphous silicon (a-Si) nanowires have been prepared on SiO2/Si substrates by AuPd nanoparticles / silane
reaction method. Field-emission scanning electron microscopy and transmission electron microscopy were used to
characterize the samples. The typical a-Si nanowires we obtained are of a uniform diameter about 20 nm and length up
to several micrometers. The growth mechanism of the nanowires seems to be the vapor-liquid-solid mechanism. The
catalytic particle size effect on the formation of the nanowires and the cause of forming amorphous state Si nanowires
are discussed.