ACCURATE DETERMINATION OF FILM THICKNESS BY LOW-ANGLE X-RAY REFLECTION

• 来源期刊: 中国物理(海外版)
• 关键词: film modified Bragg law X-ray reflection
• 年，卷（期）: 2000,（11）
• 所属期刊栏目: CONDENSED MATTER:STRUCTURE,THERMAL AND
• 页码范围: 833-836
• 页数: 4页
• 分类号: 6110,6855,6865
• 语种: 英文

摘要

A modified Bragg law for straightforward determining the film thickness by low-angle X-ray reflection was derived based on the geometrical optical theory.We showed that this modified Bragg law and its inference formulae could be used to accurately determine the thickness of the monolayer or multilayer film.Furthermore,the modified Bragg law for determining the superlattice period presented earlier by others can be derived from the above modified Bragg law.The similar inference formulae were also given.The precision in determining the film thickness and/or superlattice period by the above formulae was discussed.