Reflectivity of W/Si Multilayer at the Photo-energies of 700 eV and 1200 eV

• 来源期刊: 中国物理快报（英文版）
• 学科: 物理学
• 年，卷（期）: 2001,（11）
• 页码范围: 1481-1482
• 页数: 2页
• 分类号: O4
• 语种: 英文

摘要

We have deposited W/Si multilayer mirrors using magnetron sputtering, and measured their reflectivity at the Beijing Synchrotron Radiation Facility. The W/Si multilayer mirrors show a peak reflectivity of approximately 10% at a photo-energy of 1200eV and 10.5% at a photo-energy of 700eV at an incidence angle of 81°. So far, no higher reflectivity than that given in this letter has been reported.