Fabrication of Intrinsic Josephson Junctions on Bi2Sr2CaCu2O8+δ Single Crystals with Reproducible Surface Junctions
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摘要:
Intrinsic Josephson junctions on Bi2Sr2 CaCu2Os+δ single crystals are successfully fabricated using photolithogra-phy and Ar ion milling. Here we discuss the properties of the surface CuO2/metal bilayers and surface junctions prepared with different crystal cleavage conditions and metal flln deposition techniques. We show that, by cleav-ing the crystal at liquid nitrogen temperature in vacuum, the contents of the (interstitial) oxygen in the Bi-Olayers become stable upon cleavage, leading to a CuO2/metal bilayer and to surface junctions with reproducible properties. These results can be useful for practical device fabrications as well as for the studies of the contact properties between high Tc superconductors and normal metals.