Fabrication of Compound Lattice by Holographic Lithography

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2005,（2）
• 页码范围: 369-372
• 页数: 4页
• 语种: 英文

摘要

Some compound lattices in photonic crystals with large complete photonic band gaps, such as the diamond structure and the two-dimensional hexagonal compound structure, is desired for fabrication. A novel method for fabrication of compound lattices by holographic lithography is reported. The key point is phase modulation by photoelectrical control and multiple-exposure techniques. This technique introduces many advances: for instance,using the same coherent beams and without changing the position of the sample during multiple-exposure.