Nanocavity Shrinkage and Preferential Amorphization during Irradiation in Silicon

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2005,（3）
• 页码范围: 657-660
• 页数: 4页
• 语种: 英文

摘要

We model the recent experimental results and demonstrate that the internal shrinkage of nanocavities in silicon is intrinsically associated with preferential amorphization as induced by self-ion irradiation.