Simultaneous Elastic Recoil Detection Analysis of H and Other Elements in Foils
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摘要:
Hydrogen and other elements in SixNyHz foils have been simultaneously measured by using a single E(gas)- E(PSD) telescope and heavy 127I ion beam in elastic recoil detection analysis (ERDA). Hydrogen is measuredin the non-coincidence spectrum of E(PSD), and other elements from the △E - E coincidence spectrum. Thecomposition and depth profiling of the foils are obtained from the simulated spectra.