Influence of Positive Bias on Electrical Properties of Undoped Nanocrystalline Diamond Films

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2006,（9）
• 页码范围: 2595-2597
• 页数: 3页
• 语种: 英文

摘要

By means of electron assisted hot filament chemical vapour deposition technology, nanocrystalline diamond films are deposited on polished n-(100)Si wafer surface at 1 kPa gas pressure.