Semi-quantitative study on the Staebler-Wronski effect of hydrogenated amorphous silicon films prepared with HW-ECR-CVD system

• 来源期刊: 中国物理（英文版）
• 关键词: hydrogenated amorphous silicon Staebler-Wronski effect microwave electron cyclotron resonant chemical vapour deposition charged defects
• 年，卷（期）: 2006,（4）
• 页码范围: 813-817
• 页数: 5页
• 语种: 英文

摘要

The method of numerical simulation is used to fit the relationship between the photoconductivity in films and the illumination time.The generation and process rule of kinds of different charged defect states during illumination are revealed.It is found surprisingly that the initial photoconductivity determines directly the total account of photoconductivity degradation of sample.