Preparation and tribological properties of DLC/Ti film by pulsed laser arc deposition

• 来源期刊: 中国物理（英文版）
• 关键词: diamond like carbon tribological property pulsed laser arc deposition Ramanspectroscopy
• 年，卷（期）: 2006,（11）
• 页码范围: 2697-2705
• 页数: 9页
• 语种: 英文

摘要

This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with I(D)/I(G) 0.28 and corresponding to 76% sp3 content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at% content of carbon, hardness 8.2 GPa and Young's modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46 nm,coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.