Nanocomposite TiC/a-C:H film prepared on titanium aluminium alloy substrates by PSII assistant MW-ECRCVD

• 来源期刊: 中国物理（英文版）
• 关键词: nanocomposite TiC/a-C∶H diamond like carbon film PSII
• 年，卷（期）: 2007,（4）
• 页码范围: 1105-1110
• 页数: 6页
• 语种: 英文

摘要

Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film.the coherent strength is also obviously enhanced at the critical load of about 35N.