Development of three-dimensional profiler for large field micro-surface topography measurement

• 来源期刊: 光电子快报（英文版）
• 年，卷（期）: 2009,（4）
• 页码范围: 292-294
• 页数: 3页
• 语种: 英文
• DOI: 10.1007/s11801-009-8193-9

摘要

This paper presents a large field phase-shifting interference microscope for micro-surface topography measurement. A PZT is used as the Z-directional phase shifter. The interference microscope is the combination of the infinity tube microscope with the Mirau two-beam interferometer. Two-dimensional precision motorized stage is aligned as the scanning system in the X- and Y-direction to extend the test surface measurement range to 12.5 mm × 12.5 mm. The minimum displacement is 0.039 μm and the overlapped proportion is 0.22. A fast stitching algorithm is proposed based on grid matching. According to the reflectivity of the core and the ferrule, the plate with the transmission/reflectivity ratio of 70/30 is selected to balance the interference intensity. The instrument is proved to be valid by actual measurement of the end surface of an optical fiber connector.