Experimental and theoretical investigation of zinc diffusion in N-GaSb

• 来源期刊: 科学通报(英文版)
• 学科: 地球科学
• 关键词: 扩散实验 锌浓度 锑化镓 表面扩散系数 扩散温度 扩散时间 扩散过程 配置文件
• 年，卷（期）: 2010,（23）
• 所属期刊栏目: ARTICLES
• 页码范围: 2489-2496
• 页数: 8页
• 分类号: X55 S642.601
• 语种: 英文

摘要

Zinc diffusion process in N-GaSb was studied with excessive,appropriate and insufficient quantity of diffusion source (zinc pellets).Kink-and-tail type zinc concentration profiles obtained with appropriate zinc pellets quantity were successfully simulated using the assumption that the vacancy mechanism mediated by V0Ga and kick-out mechanism mediated by I+Ga take effect at the same time.It is found out that for diffusion temperature from 460°C to 500°C,the zinc surface concentration of the diffused samples has nearly no change and the logarithmic value of the zinc surface diffusion coefficient is linear with the reciprocal value of diffusion temperature;when the diffusion temperature is constant,both the zinc surface concentration and diffusion coefficient do not change with diffusion time.