Measurement of Random Surface Parameters by Angle-Resolved In-plane Light Scattering with Constant Perpendicular Wave Vector

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2011,（2）
• 页码范围: 105-108
• 页数: 4页
• 语种: 英文
• DOI: 10.1088/0256-307X/28/2/024206

摘要

We report the experimental method of angle-resolved in-plane light scattering for random surface parameter extraction.In the measurement of the scattered intensity profile at a certain angle of incidence, the perpendicular component of wave vector remains constant, which is realized by controlling the movement of the detector along a specified circular arc segment.We use the central S-peak and the half-width of the diffused intensity profiles and their variations to obtain the roughness w, the lateral correlation length ξ and roughness exponent a of the rough surface sample.The measurement copes strictly with the theoretical analysis, and the inherent problem in previous in-plane light scattering experiment is overcome so that the changes of the perpendicular component of wave vector affect the half width a diffused intensity profile and the measurement accuracy.