The parameters in the band-anticrossing model for GaNxAs1-x(0<x≤0.05)are obtained considering the effect of temperature and composition.It is found that the effect of composition on the N levels in the band-anticrossing model is weak.The temperature dependence of the N levels and the temperature dependence of the band gap energy of GaNAs are weaker than that of GaAs.In addition,the reason for a spectral blueshift and the effect of annealing on the parameters in the band-anticrossing model are also discussed.