Chemisorption-Induced Resonance Frequency Shift of a Microcantilever

• 来源期刊: 中国物理快报（英文版）
• 年，卷（期）: 2012,（5）
• 页码范围: 193-196
• 页数: 4页
• 语种: 英文
• DOI: 10.1088/0256-307X/29/5/056801

摘要

The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption.The resonance frequency change of a cantilever induced by chemisorption is theoretically studied. Oxygen chemisorbed on the Si(100) surface is taken as a representative example.We demonstrate that the resonant response of the cantilever is mainly determined by the chemisorption-induced bending stiffness variation,which depends on the bond configurations formed by the adsorbed atoms and substrate atoms.This study is helpful for optimal design of microcantilever-based sensors for various applications.